Automated systems

Auto-Probe 200 / 300

Precision motorized probing with pattern recognition, programmable motion and repeatable wafer-level measurement workflows.

Auto-Probe automated wafer probing system

Configuration range

Built around your device and measurement.

The Auto-Probe platform coordinates motion, optics, alignment, chuck control and electrical instrumentation so engineers can move from an approved manual test sequence to a repeatable automated workflow.

System highlights

  • 200 mm and 300 mm platforms
  • Automated alignment and wafer mapping
  • High-power and thermal configurations
  • Programmable motion and instrument control

Application fit

  • Wafer-level characterization
  • Reliability and engineering lots
  • Automated die probing
  • Repeatable production-adjacent workflows

Configure with an engineer

Get the complete measurement path.

We will match the station with probes, optics, shielding, thermal control, analyzers and cabling.