01
Manual systems
VERSA
A modular double-sided probing platform for wafers, die, packages and boards—configured around the measurement, not the other way around.
- 200–450 mm configurations
- DC, IV/CV, RF & mmW
- Thermal & dark-test ready
Micron ProbingPrecision test systemsConfigure a systemComplete semiconductor test environments
Precision starts with the right system.
Probe stations, analyzers, thermal systems, photonics automation and radiation testing—integrated around your devices, measurements and lab.
- 50–450 mm
- device & wafer formats
- Up to 110 GHz
- RF / mmW configurations
- USA + Europe
- sales, integration & support
01 Double-sided access
02 Measurement-ready integration
One partner from probe tip to data
Probe stationsAnalyzers & SMUsThermalPhotonicsRadiation TID
Featured systems
Equipment built around the measurement.
Real platforms from the Micron Probing portfolio, presented clearly so your team can compare the right starting points.
02
Automated systems
Auto-Probe 200 / 300
Precision motorized probing with pattern recognition, programmable motion and repeatable wafer-level measurement workflows.
- 200 & 300 mm platforms
- Automated alignment
- High-power & thermal options
03
Low-temperature research
Cryogenic Probe Systems
Integrated flow and closed-cycle environments for quantum, MEMS, nanoscale and electro-optical characterization.
- Below 4 K to 800 K
- Up to 6 probe arms
- DC, RF & optical access
04
Radiation qualification
TIDeX Precision X-Ray
An integrated X-ray irradiation platform for controlled Total Ionizing Dose testing of semiconductor wafers, ICs and electronic components.
- Controlled dose exposure
- Integrated dosimetry
- Unified workflow & software
05
Optical & electro-optical
Photonics Test Stations
Automated, high-precision optical alignment platforms for photonic integrated circuits from individual die through 300 mm wafers.
- 6-axis optical alignment
- Surface & edge coupling
- Single die to 300 mm
06
Source & measurement
Device Analyzers & SMUs
Semiconductor characterization instruments paired with the station, cabling and switching architecture your measurement requires.
- IV, CV & pulsed IV
- Modular SMU channels
- Probe-station integration
07
General-purpose probing
ACE Probe Station
A compact, value-focused manual probing platform for daily device work, education, R&D and straightforward characterization.
- 150 mm chuck
- Stereo or compound optics
- Flexible positioner packages
08
Automated inspection
EWS100 Wafer Inspection
A high-throughput optical inspection platform with automated motion, precision alignment and production-ready wafer mapping.
- 4–12 inch wafers
- Up to 100 MP imaging
- 2 µm optical resolution
Application range
From first contact to confident data.
Every cable, probe, chuck, enclosure and instrument affects the result. We configure the whole path as one test environment.
Start a configurationDC / IV / CV
Low-current, guarded and triax measurement paths for repeatable device characterization.
RF / mmW
Station, probe, cable and calibration integration for high-frequency work through 110 GHz.
High power
Interlocked configurations for high-voltage and high-current semiconductor evaluation.
Thermal
Ambient through extended-temperature chuck systems for characterization from −65 to 400 °C.
Photonics
Electrical and optical alignment brought together for die-to-300 mm photonics workflows.
Radiation TID
Controlled X-ray irradiation and in-situ electrical measurement for component qualification.
µ
01 Device & fixture
02 Probe & environment
03 Instrument & software
System integration
One measurement path. No disconnected boxes.
Micron Probing pairs the mechanical platform with positioners, optics, thermal control, shielding, analyzers, cabling and software. The result is a system designed to work together from installation.
01Define the testDevice, measurement limits, environment and throughput.
02Engineer the configurationResolve access, compatibility, safety and signal integrity.
03Install and supportCoordinate delivery, setup, training and long-term service.
Start your system
Tell us what you need to measure.
Share the device format, electrical range, temperature, frequency and throughput. We’ll help build the right configuration.