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Cryogenic Probe Stations

What can Quantum Computing do for us?
Solve equations otherwise impossible or impractical to solve while optimizing systems and revolutionizing the worlds of finance, medicine, utilities, & artificial intelligence

Wafer Probing Goes Cryogenic
Research facilities around the world are developing components that will move computing to new heights. One major challenge is to replicate the environments that these components will operate in. Micron Probing is working with the finest probe system makers to assist our customers evaluate new devices and circuits, verify operating parameters, and validate volume fabrication processes. As our customers move forward to design and develop the innovations of tomorrow, Micron Probing works to aid them
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Flow Cryostat Probe Station
<4 K - 400 K temperature range with liquid helium
77 K - 400 K temperature range with liquid nitrogen

Flow Cryostat Probe Stations use Liquid Helium or Liquid Nitrogen as the cooling agent to reach cryogenic temperatures of 4 K or 77 K depending upon the cryogen used.

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The core of the system is the same for both the Liquid and Closed Cycle Probe Stations, which enables the Flow Cryostat to be removed from this system and replaced with a Closed Cycle (cryogen-free) configuration at a later point, if your needs change.

 

ARS manufactures both the Helitran Helium transfer system and the probe station. This integrated approach ensures consistent performance and also facilitates diagnostics and service of the integrated system.

Features

  • <4 K - 400 K temperature range with liquid helium

  • 77 K - 400 K temperature range with liquid nitrogen

  • 2 in. test area

  • 2.75 in. clear view top window

  • Up to 6 micro-manipulated probe arms

  • 2 additional accessory ports

  • Thermally anchored triaxial single tip probe holders with

  • replaceable tungsten tips

  • 1 µm sensitivity precision actuators

  • High stability spring-loaded linear motion stages

  • All stainless steel vacuum enclosure for low vacuum and

  • fast pumping times

  • 7:1 zoom microscope with ring light

  • Super soft copper braids transmit maximum cooling power and minimal vibrations to cold stage

  • Elastomeric isolators on table for high frequency vibration dampening

  • Soft air mount feet for high shock and low frequency vibration dampening

  • Heated radiation shield for faster sample change

  • Cryogen free

  • Fully customizable

Closed-Cycle Cryogenic Probe Station 
<4 K-800 K temperature range available

This system is ideal for the study of electro-optical properties in variety of experiments, including quantum dots, spintronic devices, and nanoscale electronics.

 

The probe configuration and system design can be customized to suit your specific experimental requirements, including RF Probes for high frequency response and low drift supports for long-term viewing of the sample. This model of Probe Station utilizes the DE-210 Series of cryocoolers.  

 

These cryocoolers allow for sample stage Temperatures of 7K. All of the ARS Closed Cycle Cryocoolers are designed with high first stage cooling capacity which allows for fast cool downs and dissipation of high radiative heat loads.   The system comes with a polished stainless steel Vacuum Chamber and an Au/ Ni plated OFHC Radiation Shield.  

 

The high quality materials allow for high vacuum levels and ultimately cleaner sample environments. ARS’ integrated approach of manufacturing for both the cryocooler and the probe station ensures consistent performance, and also facilitates diagnostics and service of the integrated system. 

Features

  • Typical Configuration

  • Options & Upgrades

  • <4 K-800 K temperature range available

  • 2 in. test area

  • 2.75 in. clear view top window

  • Up to 6 micro-manipulated probe arms

  • 2 additional accessory ports

  • Thermally anchored triaxial single tip probe holders with

  • replaceable tungsten tips

  • 1 µm sensitivity precision actuators

  • High stability spring-loaded linear motion stages

  • All stainless steel vacuum enclosure for low vacuum and

  • fast pumping times

  • 7:1 zoom microscope with ring light

  • Super soft copper braids transmit maximum cooling power and minimal vibrations to cold stage

  • Elastomeric isolators on table for high frequency vibration dampening

  • Soft air mount feet for high shock and low frequency vibration dampening

  • Heated radiation shield for faster sample change

  • Cryogen free

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Applications
 

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  • Magnetic properties

  • DC, RF properties

  • Microwave properties

  • MEMS

  • Nanoscale electronics

  • Superconductivity

  • Electrical and optical properties of nano circuits

  • Quantum dots and wires

  • Non-destructive device testing

Applications Overview

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  • Optical Spectroscopy and Microscopy

    • Ultra low vibrations (3-5 nm)

  • Quantum Optics

  • Photoluminescence

  • Raman Scattering

  • Fourier-Transform Infrared Spectroscopy

  • Photoelectric Effect 

  • Magneto-Opto Kerr Effect

  • Matrix Isolation

  • Mössbauer Spectroscopy

  • Time-Domain Thermoreflectance

  • Angle-Resolved Photoemission Spectroscopy 

  • Deep-Level Transient Spectroscopy

  • Ellipsometry 

  • Electrical Transport

  • Electron Transport

  • Magnetotransport

  • Thermoelectric Effect

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  • Chemistry and Biology

  • Noble Gas Analysis

  • Parahydrogen

  • Electron Paramagnetic Resonance/Electron Spin Resonance

  • Beamline Science

  • X-Ray Diffraction

  • Neutron Scattering

  • High-Pressure Physics

  • Diamond Anvil Cell

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  • Cold Atoms

  • Ion Trapping 

    • Offers true UHV vacuum levels of 10-11 Torr

  • Scanning Probe Microscopy

  • Atomic Force Microscopy

    • ​Spatial resolutions from few nanometers to the atomic scale.

  • Scanning Tunnel Microscopy

  • Scanning Electron Microscopy

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DE-210 Cryocooler
 

The DE-210 is our largest and most powerful closed cycle cryocooler. This system is ideal when there are high heat loads and when fast cooldowns need to occur.

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ARS manufactures both the cryocooler and the laboratory interface allowing for seamless trouble-free integration of our laboratory systems.

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Our DE-210 cryocoolers are typically equipped with a bolt-on stainless steel instrumentation skirt with an ISO-160 flange (DE-210E).

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The DE-210F is just the bare cold head geared towards OEMs and system builders who prefer to build their own custom laboratory interface.

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The ARS manufactured DE-210B is a true UHV cold head (10-11 Torr) where all of the rubber o-ring seals have been replaced with welded joints and metal seals.

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Analytical Probe Stations

Design and implement testing programs for devices from the wafer level to the product level. Automate you most precise testing needs at .1 micron scale. 

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Software

Optical and analytical software solutions for all your semiconductor needs.

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