Automated inspection

EWS100 Wafer Inspection

A high-throughput optical inspection platform with automated motion, precision alignment and production-ready wafer mapping.

Configure this system Application review

EWS100 automated wafer inspection system

Configuration range

Built around your device and measurement.

The EWS100 brings motion, illumination, optics, imaging software and wafer handling into a single inspection workflow that can be configured around the defects and features your team needs to resolve.

System highlights

4–12 inch wafers
Imaging up to 100 MP
2 µm optical resolution
Automated mapping and review

Application fit

Incoming wafer inspection
Defect review
Process development
Automated optical metrology

Configure with an engineer

Get the complete measurement path.

We will match the station with probes, optics, shielding, thermal control, analyzers and cabling.

Request a configuration +1 727-331-5961